JAVAC Pty. Ltd.
36 Enterprise DriveRowville, Victoria 3178Australia
1300 786 771
P +61 3 9763 7633
F +61 3 9763 2756
The TURBOVAC MAG pumps are turbo molecular pumps with magnetic rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-10 Torr). Pumping speeds for air vary from 300 l x s-1 to 3,200 I x s-1.
The TURBOVAC MAG pumps are mostly installed on semiconductor provessing lines like etching, CVD, PVD and ion implantation, i.e. in applications where corrosive gases need to be pumped. Also electron beam microscopy is an important area of application for these pumps.
Models available: TURBOVAC models available from 300 l x s-1 to 3,200 I x s-1
Pricing available on request. Submit an enquiry or call us for details.
Crafted with care by James Davies.