CoolVac

Cryopumps are gas entrapment vacuum pumps for the pressure range form 10-3 to < 10-11 mbar (0.75 x 10-3 to < 0.75 x 10-11 Torr). The principle of operation is that gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping.

In order to be able to produce a high or ultra-high vacuum the cold surfaces (cryopanels) must be cool to a sufficiently low temperature. Depending on the type of cooling system used a difference is made between refrigerator cryopumps, bath cryopumps and evaporator cryopumps.

Multiple models available: 800 / 1500 / 2000 / 3000 / 5000 / 10000 / 18000

Advantages to the User

• Hydrocarbon-free high vacuum
• High capacity for argon and hydrogen
• High crossover value
• Simple operation
• Trouble-free integration into complex systems
• Fully automatic regeneration through Cryo Compact Control
• Easy servicing

Typical Applications

• Evaporators
• Sputtering systems
• Ion implanters
• Optical coating systems
• Metallization systems

Pricing available on request. Submit an enquiry or call us for details.