Bench Top Turbo IV
The Bench Top Turbo IV accept up to 6" substrates, accommodates a bell jar size of up to 12" diameter and 18" high, with automated touch screen controls.
This unit is a high vacuum deposition system that achieves an ultimate base vacuum in the 10-7 torr range. A countertop unit, it features a large baseplate that accomodates more feedthroughs, more fixtures and more applications.
The compound turbo molecular pump operates at a rate of 65 litres/second to achieve excellent base vacuum levels and gas load handling.
The touch screen interface to the PLC provides full control for the following modes: service, manual and semi-automatic. Standardised software supplied with the unit avoids the need to customise the controls and a safety interlock mitigates damage to both the operator and equipment.
This unit has the option of Rotating Plates and Tables and Quartz Crystal Thickness Monitors. To discuss further options you can contact JAVAC on 130 786 771.